发明名称 SOLID-STATE IMAGING DEVICE, LAYOUT DATA GENERATING DEVICE AND LAYOUT DATA GENERATING METHOD
摘要 A solid-state imaging device includes pixels respectively having photoelectric conversion units and arranged in matrix in basic pattern units, and an optical member arranged on the incidence side of incident light than the pixels and having constituent elements respectively corresponding to the pixels. The pixels include first, second and third wavelength range light pixels. Each basic pattern is comprised of a combined arrangement pattern of the wavelength range light pixels. Misregistration constituent elements with the occurrence of misregistration exist in the constituent elements. The misregistration increases toward the misregistration constituent elements separated from a center position of a pixel array of the pixels. The misregistration of the misregistration constituent element for the first wavelength range light pixel and that of the misregistration constituent element for the third wavelength range light pixel are smaller and larger than that of the misregistration constituent element for the second wavelength range light pixel, respectively.
申请公布号 US2016188787(A1) 申请公布日期 2016.06.30
申请号 US201615064387 申请日期 2016.03.08
申请人 RENESAS ELECTRONICS CORPORATION 发明人 MOMONO Hiroyuki;TSUBOI Nobuo
分类号 G06F17/50;H01L27/146 主分类号 G06F17/50
代理机构 代理人
主权项 1. A mon-transitory computer-readable medium storing a layout data generating program for causing a computer to execute the generation of layout data indicative of arrangement positions of a plurality of constituent elements configuring an optical member of a solid-state imaging device including: a plurality of pixels respectively having photoelectric conversion units each converting incident light into an electric charge and arranged in a matrix form in units of basic patterns, and the optical member arranged on the incidence side of the incident light than the pixels and having the constituent elements respectively corresponding to the pixels, in which the pixels include: a first wavelength range light pixel that makes first wavelength range light included in the incident light incident, a second wavelength range light pixel that makes incident second wavelength range light included in the incident light and shorter in wavelength than the first wavelength range light, and a third wavelength range light pixel that makes incident third wavelength range light included in the incident light and shorter in wavelength than the second wavelength range light, in which each of the basic patterns is comprised of an arrangement pattern formed by combining the first wavelength range light pixel, the second wavelength range light pixel and the third wavelength range light pixel, in which the layout data generating program includes: (a) a process for inputting initial layout data indicative of respective initial arrangement positions of the constituent elements arranged in the same positions as the photoelectric conversion units planarly, and shrink rate data indicative of rates at which the respective arrangement positions of the constituent elements are shrunken, (b) a process for calculating shrink layout data indicative of arrangement positions where the initial arrangement positions are shrunken, from the initial layout data, based on the shrink rate data inputted in the (a) process, (c) a process for dividing the shrink layout data by grid data indicative of a unit to digitize the shrink layout data to calculate divided data, (d) a process for performing integer processing on the divided data when numeric data after a decimal point is included in the divided data, to calculate integer data, (e) a process for multiplying the grid data and the integer data to thereby calculate corrected layout data indicative of the digitized shrink layout data, and (f) a process for outputting the corrected layout data, in which the initial layout data includes: first initial layout data indicative of the initial arrangement position of the constituent element corresponding to the first wavelength range light pixel, second initial layout data indicative of the initial arrangement position of the constituent element corresponding to the second wavelength range light pixel, and third initial layout data indicative of the initial arrangement position of the constituent element corresponding to the third wavelength range light pixel, in which the shrink rate data includes: first shrink rate data indicative of a shrink rate of the constituent element corresponding to the first wavelength range light pixel, second shrink rate data indicative of a shrink rate of the constituent element corresponding to the second wavelength range light pixel and smaller in value than the first shrink rate data, and third shrink rate data indicative of a shrink rate of the constituent element corresponding to the third wavelength range light pixel and smaller in value than the second shrink rate data, in which the shrink layout data includes: first shrink layout data indicative of an arrangement position where the initial arrangement position of the constituent element corresponding to the first wavelength range light pixel is shrunken, second shrink layout data indicative of an arrangement position where the initial arrangement position of the constituent element corresponding to the second wavelength range light pixel is shrunken, and third shrink layout data indicative of an arrangement position where the initial arrangement position of the constituent element corresponding to the third wavelength range light pixel is shrunken, in which the divided data includes: first divided data corresponding to the first shrink layout data, second divided data corresponding to the second shrink layout data, and third divided data corresponding to the third shrink layout data, in which the integer data includes: first integer data corresponding to the first divided data, second integer data corresponding to the second divided data, and third integer data corresponding to the third divided data, in which the corrected layout data includes: first corrected layout data indicative of a correction position of the constituent element corresponding to the first wavelength range light pixel, second corrected layout data indicative of a correction position of the constituent element corresponding to the second wavelength range light pixel, and third corrected layout data indicative of a correction position of the constituent element corresponding to the third wavelength range light pixel, in which the (b) process calculates the first shrink layout data from the first initial layout data, based on the first shrink rate data, calculates the second shrink layout data from the second initial layout data, based on the second shrink rate data, and calculates the third shrink layout data from the third initial layout data, based on the third shrink rate data, in which the (c) process divides the first shrink layout data by the grid data to calculate the first divided data, divides the second shrink layout data by the grid data to calculate the second divided data, and divides the third shrink layout data by the grid data to calculate the third divided data, in which the (d) process performs integer processing on the first divided data to calculate the first integer data, performs integer processing on the second divided data to calculate the second integer data, and performs integer processing on the third divided data to calculate the third integer data, and in which the (e) process multiplies the grid data and the first integer data to thereby calculate the first corrected layout data, multiplies the grid data and the second integer data to thereby calculate the second corrected layout data, and multiplies the grid data and the third integer data to thereby calculate the third corrected layout data.
地址 Tokyo JP