Structure with getter material hermetically protected during the manufacturing thereof

摘要

The method involves producing a getter structure (104) that comprises a portion made of getter material (110) permeable to gas covered by a protective layer (112) hermetic to the gas. The getter structure is hermetically encapsulated in a cavity (106). A local opening (116) is realized and passed through the protective layer. The local opening is formed an access to the portion of getter material permeable to gas. Multiple channels are made in the portion of getter material permeable to gas, where the portion of getter material permeable to gas comprises a porous material.