发明名称 MONOLITHIC INTEGRATION TECHNIQUES FOR FABRICATING PHOTODETECTORS WITH TRANSISTORS ON SAME SUBSTRATE
摘要 Examples of the various techniques introduced here include, but not limited to, a mesa height adjustment approach during shallow trench isolation formation, a transistor via first approach, and a multiple absorption layer approach. As described further below, the techniques introduced herein include a variety of aspects that can individually and/or collectively resolve or mitigate one or more traditional limitations involved with manufacturing PDs and transistors on the same substrate, such as above discussed reliability, performance, and process temperature issues.
申请公布号 WO2016085880(A1) 申请公布日期 2016.06.02
申请号 WO2015US62198 申请日期 2015.11.23
申请人 ARTILUX, INC. 发明人 CHENG, SZU-LIN;CHEN, SHU-LU
分类号 H01L27/146;H01L21/20;H01L21/3205;H01L21/768;H01L21/8234;H01L23/522;H01L27/06;H01L31/10;H04N5/369 主分类号 H01L27/146
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