METHOD AND APPARATUS FOR SUBSTRATE SURFACE CLEANING

摘要

A method and apparatus for substrate, such as glass substrate, surface cleaning include one or more nozzles to deliver a cleaning fluid to one or more edges of a substrate and a roller that includes a plurality of angled channels on the outer surface of the roller. The roller is configured to contact a surface of the substrate and the angled channels are configured to laterally channel fluid and particles toward opposite axial ends of the roller.