X-ray camera for the high-resolution detection of X-rays

摘要

The invention relates to an X-ray camera (100) for the high-resolution detection of X-rays (1), comprising a plurality of radiation detectors (10), each of which has a carrier substrate (11), a detector layer (12), and contact electrodes (13). The detector layer (12) contains GaN, lies on the carrier substrate (11), and has a thickness of less than 50 μm. The contact electrodes (13) form ohmic contacts with the detector layer (12). The X-ray camera also comprises a retaining device (20) on which the radiation detectors (10) are arranged along a specified reference line or reference surface (21). The invention also relates to a method for capturing an image of an object (2, 3) being examined using X-rays (1), said X-ray camera (100) being used in the method.

主权项

1. An X-ray camera for spatially resolved detection of X-ray radiation, comprising:
a plurality of radiation detectors, each of which having a carrier substrate, a detector layer and contact electrodes, wherein the detector layer contains GaN, is arranged on the carrier substrate and has a thickness of less than 50 μm and the contact electrodes form ohmic contacts with the detector layer, and a holding device, on which the radiation detectors are arranged along a predetermined reference line or reference surface, wherein each of the radiation detectors is provided with a first contact electrode and a second contact electrode, and the radiation detectors are arranged in such a way that the carrier substrates are uniformly directed towards a common front side of the X-ray camera, which forms a radiation entry window of the X-ray camera, and the first and second contact electrodes of each of the radiation detectors are uniformly directed towards a common rear side of the X-ray camera, said rear side being opposite to the front side.