| 发明名称 | Ionization vacuum gauge | ||
| 摘要 | An ionization vacuum gauge includes a cathode, an anode and an ion collector. The ion collector component is located at one side of the anode component and spaced from the anode component. The cathode component is located at another side of the anode component and includes an electron emitter, which extends toward the anode component from the cathode component. The electron emitter includes at least one carbon nanotube wire. | ||
| 申请公布号 | US9355825(B2) | 申请公布日期 | 2016.05.31 |
| 申请号 | US201213661011 | 申请日期 | 2012.10.25 |
| 申请人 | Tsinghua University;HON HAI PRECISION INDUSTRY CO., LTD. | 发明人 | Liu Peng;Zhou Duan-Liang;Zhang Chun-Hai;Qi Jing;Chen Pi-Jin;Fan Shou-Shan |
| 分类号 | G01L21/34;B82Y10/00;B82Y30/00;H01J41/06 | 主分类号 | G01L21/34 |
| 代理机构 | Novak Druce Connolly Bove + Quigg LLP | 代理人 | Novak Druce Connolly Bove + Quigg LLP |
| 主权项 | 1. An ionization gauge, comprising: an anode component, wherein the anode component comprises a metallic disk with a through hole, and a thickness of the metallic disk ranges from about 50 micrometers to about 1 millimeter; an ion collector component located at one side of the anode component and spaced from the anode component; and a cathode component located at another side of the anode component and comprising an electron emitter, wherein the electron emitter comprises a carbon nanotube wire extending toward the anode component, and aiming at a center point of the through hole. | ||
| 地址 | Beijing CN | ||