发明名称 |
FLUID PROCESSING SYSTEM AND METHOD |
摘要 |
PROBLEM TO BE SOLVED: To rapidly provide, in a situation of providing formulations of a plurality of components for industrial or commercial use, a wide variety of formulations for desired processes, while avoiding waste of source material and minimizing need for cleaning of constituent storage and/or dispensing components.SOLUTION: Systems and methods for delivering fluid-containing feed material to a process device are disclosed. A liner-based pressure dispensing tank is filled by application of vacuum between a liner and an overpack. A plurality of feed material flow controllers of different calibrated flow ranges may be selectively operated in parallel for single feed material. Feed material blending and testing for scale-up may be performed while the feed material is supplied by a plurality of liner-based pressure dispensing containers. A gravimetric system may be used to determine concentration of at least one component of a multi-component solution or mixture.SELECTED DRAWING: Figure 3 |
申请公布号 |
JP2016094255(A) |
申请公布日期 |
2016.05.26 |
申请号 |
JP20160021497 |
申请日期 |
2016.02.08 |
申请人 |
ADVANCED TECHNOLOGY MATERIALS INC |
发明人 |
LURCOTT STEVEN M;JOHN E Q HUGHES;PETER WRSCHKA;BAUM THOMAS H;WARE DONALD D;ZOU PENG |
分类号 |
B65B3/16;B01F15/02;B01F15/04;B01J4/02;H01L21/027 |
主分类号 |
B65B3/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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