| 发明名称 |
INSPECTION SYSTEM AND METHOD USING AN OFF-AXIS UNOBSCURED OBJECTIVE LENS |
| 摘要 |
An inspection system is provided that can include a reflectometer having a light source for projecting light, and a light splitter for receiving the light projected by the light source, transforming at least one aspect of the light, and projecting the light once transformed. The reflectometer further has an off-axis unobscured objective lens through which the light transformed by the light splitter passes to contact a fabricated component, and has a detector for detecting a result of the transformed light contacting the fabricated component. The inspection system can additionally, or alternatively, include an ellipsometer having a light source similar to the reflectometer, and further a polarizing element to polarize the light of the light splitter. The polarized light passes through an off-axis unobscured objective lens to contact a fabricated component, and a detector detects a result of the polarized light contacting the fabricated component. |
| 申请公布号 |
US2016139032(A1) |
申请公布日期 |
2016.05.19 |
| 申请号 |
US201514668879 |
申请日期 |
2015.03.25 |
| 申请人 |
KLA-Tencor Corporation |
发明人 |
Rampoldi Claudio;Blasenheim Barry;Kuznetsov Alexander;Krishnan Shankar;Shchegrov Andrei V. |
| 分类号 |
G01N21/21;G01N21/55;G01N21/47 |
主分类号 |
G01N21/21 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An inspection system, comprising:
a reflectometer including: a light source for projecting light; a light splitter for receiving the light projected by the light source, transforming at least one aspect of the light, and projecting the light once transformed; an off-axis unobscured objective lens through which the transformed light passes to contact a fabricated component; and a detector for detecting a result of the transformed light contacting the fabricated component. |
| 地址 |
Milpitas CA US |
