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发明名称
IRRADIATION HEATING FURNACE
摘要
申请公布号
JPS597883(A)
申请公布日期
1984.01.17
申请号
JP19820116184
申请日期
1982.07.06
申请人
USHIO DENKI KK
发明人
ARAI TETSUHARU
分类号
F27D11/02;C21D1/34;F27D11/00;H01L21/205;H01L21/26;H05B3/00
主分类号
F27D11/02
代理机构
代理人
主权项
地址
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