| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration element, a vibrator, electronic equipment and a mobile body, in which reduction in detection accuracy can be decreased by decreasing noise mixing in a detection signal terminal.SOLUTION: A vibration element 6 includes: a vibration piece 60 having a vibrator having a detection vibration arm 621, a support part 651 that supports the vibrator, and beams 661, 662 connecting the support part 651 and the vibrator; a detection signal electrode 671a provided on the detection vibration arm 621; a detection signal terminal provided on a lower face of the support part 651 and electrically connected to the detection signal electrode 671a; and a constant potential electrode 675 disposed on an upper face of the support part 651 and located to overlap the detection signal terminal in a plan view of the vibration piece 60, and electrically connected at a constant potential.SELECTED DRAWING: Figure 2 |
