MULTI-DIRECTIONAL SYSTEM FOR TRANSFERRING WAFER

摘要

The present invention relates to a multi-directional wafer transfer system to maximize space utilization for a place where a wafer transfer device is installed by configuring a wafer cassette transfer device between load ports installed in wafer transfer devices facing each other, respectively, and to reduce device installation costs. Such a multi-directional wafer transfer system comprises: at least a pair of wafer transfer devices which are disposed such that door portions face each other; load ports which are installed in the wafer transfer devices facing each other, respectively; a wafer cassette which is configured to keep a wafer therein; and a wafer cassette transfer device which is installed between the load ports facing each other to rotate and horizontally move the wafer cassette.