发明名称 ドレッサー
摘要 A dresser includes an attachment secured to a dresser shaft for rotating the dresser, a disk holder removably attached to the attachment by a magnetic force, and a dresser disk removably attached to the disk holder. The dresser disk has a dressing surface. Each of the attachment and the disk holder has magnet for generating the magnetic force.
申请公布号 JP5919157(B2) 申请公布日期 2016.05.18
申请号 JP20120219304 申请日期 2012.10.01
申请人 株式会社荏原製作所 发明人 篠崎 弘行
分类号 B24B53/12;H01L21/304 主分类号 B24B53/12
代理机构 代理人
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