| 摘要 |
PROBLEM TO BE SOLVED: To easily create a highly reliable part program.SOLUTION: A method for programming a three-dimensional (3D) work scan path of a measurement system, includes: a 3D motion control system; a first type Z height detection system; and a second type Z height detection system for providing a relatively lowly accurate surface Z height measured value across a relatively wide Z height measurement range. The method includes: a step of placing a representative work on the stage of the measurement system; a step of defining at least a first work scan path segment for the representative work; a step of calculating a provisional surface Z height measured value along the first work scan path segment; and a step of determining a precise 3D scan path for allowing the first type Z height detection system to move so as to perform precise surface Z height measurement. The precise 3D scan path is based on the determined provisional surface Z height measured value.SELECTED DRAWING: Figure 2 |
