| 摘要 |
PROBLEM TO BE SOLVED: To provide an inkjet device comprising wiring that is connected to an upper electrode of a piezoelectric element and hardly disconnected.SOLUTION: An inkjet head 1 includes: an actuator substrate that partitions a cavity 5 that stores ink; a vibrating film that is supported in the actuator substrate and partitions the cavity 5; a piezoelectric element 7 that is provided on the vibrating film and includes an upper electrode 20, a lower electrode, and a piezoelectric body film sandwiched between the upper electrode 20 and the lower electrode; and upper wiring 25 that is connected to the upper electrode 20 and extends from the upper electrode 20 to a region outside the cavity 5. The upper wiring 25 has a total width W3 equal to a width W2 of the upper electrode 20 or more.SELECTED DRAWING: Figure 1 |
