发明名称 |
CONVECTIVE WAFER HEATING BY IMPINGEMENT WITH HOT GAS |
摘要 |
An apparatus for processing wafer-shaped articles comprises a rotary chuck holding a wafer shaped article of a predetermined diameter in a predetermined orientation. The chuck includes a heater comprising a plurality of gas nozzles directed toward a surface of a wafer shaped article when held by the chuck. The heater comprises a gas inlet and at least one heating element for heating gas to be discharged through the plurality of gas nozzles. The heater is configured to heat a wafer shaped article principally by convective heat transfer from heated gas discharged through the plurality of gas nozzles. |
申请公布号 |
KR20160049975(A) |
申请公布日期 |
2016.05.10 |
申请号 |
KR20150147380 |
申请日期 |
2015.10.22 |
申请人 |
LAM RESEARCH AG |
发明人 |
HACE JOEL IZTOK;NAVARRE MARTIN |
分类号 |
H01L21/324;H01L21/67;H01L21/687 |
主分类号 |
H01L21/324 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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