发明名称 |
LIQUID EJECTION DEVICE, NANOIMPRINTING APPARATUS, NANOIMPRINTING LIQUID STORAGE TANK, METHOD OF MANUFACTURING CURED PRODUCT PATTERN, METHOD OF MANUFACTURING OPTICAL COMPONENT, METHOD OF MANUFACTURING CIRCUIT BOARD, AND METHOD OF MANUFACTURING IMPRINTING MOLD |
摘要 |
A liquid ejection device includes a storage section storing a nanoimprinting liquid and also includes an ejection port which communicates with the storage section and which ejects the nanoimprinting liquid. The storage section contains a sorption medium that adsorbs or absorbs at least one selected from the group consisting of particles, metal ions, and water. The sorption medium is not ejected from the ejection port when the nanoimprinting liquid is ejected from the ejection port. |
申请公布号 |
WO2016067525(A1) |
申请公布日期 |
2016.05.06 |
申请号 |
WO2015JP05055 |
申请日期 |
2015.10.05 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
ITO, TOSHIKI;ARAKI, YOSHIMASA;SAKAMOTO, KAZUMI |
分类号 |
H01L21/027;B05C5/00;B05C11/10;B05D1/26;B05D3/06;B29C59/02 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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