| 发明名称 |
MULTI-LAYER COMPOSITE BACKPLATE FOR MICROMECHANICALA MICROPHONE |
| 摘要 |
A MEMS device. The device includes a membrane, and a reinforced backplate having a plurality of openings. The reinforced backplate include a first layer, and a second layer coupled to the first layer. |
| 申请公布号 |
US2016127837(A1) |
申请公布日期 |
2016.05.05 |
| 申请号 |
US201414894390 |
申请日期 |
2014.05.28 |
| 申请人 |
ROBERT BOSCH GMBH |
发明人 |
Zinn John W.;Diamond Brett Matthew |
| 分类号 |
H04R19/00;B81B3/00 |
主分类号 |
H04R19/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A MEMS device, the device comprising:
a membrane; and a reinforced backplate having a plurality of openings, the reinforced backplate including a first layer and a second layer coupled to the first layer. |
| 地址 |
Stuttgart DE |
