| 发明名称 |
SURFACE EMITTING LASER, ATOMIC OSCILLATOR, AND MANUFACTURING METHOD OF SURFACE EMITTING LASER |
| 摘要 |
A surface emitting laser includes: a substrate; and a laminated body disposed over the substrate, wherein the laminated body includes a first mirror layer disposed over the substrate, an active layer disposed over the first mirror layer, and a second mirror layer disposed over the active layer, and surface roughness Ra of an uppermost layer of the first mirror layer is greater than or equal to 0.45 nm and less than or equal to 1.0 nm. |
| 申请公布号 |
US2016126703(A1) |
申请公布日期 |
2016.05.05 |
| 申请号 |
US201514925064 |
申请日期 |
2015.10.28 |
| 申请人 |
Seiko Epson Corporation |
发明人 |
HAGINO Takashi |
| 分类号 |
H01S5/343;H01S5/187;H01S5/183;H03B17/00 |
主分类号 |
H01S5/343 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A surface emitting laser comprising:
a substrate; and a laminated body disposed over the substrate, wherein the laminated body includes a first mirror layer disposed over the substrate, an active layer disposed over the first mirror layer, and a second mirror layer disposed over the active layer, and surface roughness Ra of an uppermost layer of the first mirror layer is greater than or equal to 0.45 nm and less than or equal to 1.0 nm. |
| 地址 |
Tokyo JP |
