| 摘要 |
The invention relates to a magnetron arrangement (100, 200, 250, 300, 400, 700) which, according to different embodiments, can have the following: a processing chamber wall (102); a first end block arrangement (104) and a second end block arrangement (106) which form an end block pair for rotatably bearing and supplying a tube cathode (108); a base arrangement (114, 154, 314, 4, 714) to which the first end block arrangement (104) is secured; wherein the processing chamber wall (102) can have a first securing arrangement (124) for securing the base arrangement (114, 154, 314, 4114) to the processing chamber wall (102), and the processing chamber wall can have a second securing arrangement (126) for securing the second end block arrangement (106) to the processing chamber wall (102); a position of the first end block arrangement (104) relative to the second end block arrangement (106) can be defined by means of the first securing arrangement (124) and the second securing arrangement (126); and the base arrangement (114, 154, 314, 414, 514, 714) can be designed to deflect the first end block arrangement along at least two degrees of freedom relative to the processing chamber wall (102). |
