CHEMICAL LIQUID PREPARATION METHOD, CHEMICAL LIQUID PREPARATION DEVICE, AND CHEMICAL CLEANING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a method for preparing a chemical liquid for chemically cleaning the scales of hematite and magnetite at low cost in a short time, and also to provide a device for preparing the chemical liquid and a chemically cleaning method.SOLUTION: There is provided a method of preparing a chemical liquid for cleaning a member in which the scales of magnetite and hematite are formed on a base material. The chemical liquid preparation method includes a process (S1) of preparing in a chemical liquid tank, a hematite-cleaning chemical liquid including a neutral rust removal agent and having an electric potential capable of dissolving hematite, and a process (S4) of preparing in the chemical liquid tank, a magnetite-cleaning chemical liquid including the neutral rust removal agent and having the electric potential capable of dissolving magnetite different from the electric potential of the hematite-cleaning chemical liquid.SELECTED DRAWING: Figure 3