Process chamber incorporating an arrangement for injecting gaseous fluid thereinto

摘要

A process chamber (5) has an interior space (39). In the interior space (39), there is a receiving region (15) for workplaces (3). The process chamber (5) has an opening (12, 14) for the entry and exit of workplaces (3). The process chamber includes an arrangement (17, 19, 25, 29, 33, 37, 35) for injecting gaseous fluid into the interior space (39). The arrangement for injecting gaseous fluid has at least one nozzle (17, 19) for producing a fluid flow curtain (21, 23) between the opening (12, 14) and the receiving region (15) for workplaces (3).

主权项

1. A process chamber defining an interior space, the process chamber comprising:
a ceiling and a floor conjointly defining a tunnel-shaped receiving region in said interior space for accommodating workpieces therein; a portal through which said workpieces are passed into or out from said receiving region; an arrangement for blowing a gaseous fluid into said interior space; said arrangement including a slit-shaped nozzle or aperture extending transversely to said interior space and being configured for generating a fluid flow curtain between said portal and said receiving region; said arrangement further including a guide contour disposed in said interior space; said guide contour defining a side facing toward said portal; said slit-shaped nozzle or aperture being configured to feed said gaseous fluid from above said ceiling into said interior space along said guide contour with a flow direction inclined with respect to said floor; a lock in said interior space facing toward said portal; said lock including a wall arranged facing toward said side of said guide contour; said wall and said guide contour conjointly delimiting a mixing chamber disposed above said portal and set back upwardly with reference to said ceiling wherein air accumulates originating from the region of said portal; and, said mixing chamber being configured so as to permit said gaseous fluid flowing from said slit-shaped nozzle or aperture to draw said air into said interior space and entrain said air in said mixing chamber to form said fluid flow curtain extending from said ceiling down to said floor of said tunnel-shaped receiving region.