| 发明名称 |
YTTRIA BASED CONDUCTIVE PLASMA-RESISTANT MEMBER AND METHODS THEREOF |
| 摘要 |
The present invention discloses a conductive plasma-resistant member including an yttrium oxide. The plasma-resistant member of the present invention includes an yttrium compound which includes a matrix phase consisting of yttrium oxides, and a conductive dispersed phase. According to the present invention, the present invention provides a semiconductor-grade yttria composite which may be used as a plasma-resistant member requiring conductivity like a focus ring. |
| 申请公布号 |
US2016104551(A1) |
申请公布日期 |
2016.04.14 |
| 申请号 |
US201514879789 |
申请日期 |
2015.10.09 |
| 申请人 |
KOREA INSTITUTE OF MACHINERY & MATERIALS |
发明人 |
KIM Hai Doo;LEE Jae Wook;KIM Ha Neul;KIM Jin Myung;PARK Young Jo;KO Jae Woong |
| 分类号 |
H01B1/16;C04B35/56 |
主分类号 |
H01B1/16 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A plasma-resistant member comprising an yttrium compound, comprising:
a matrix phase consisting of yttrium oxides; and a conductive dispersed phase. |
| 地址 |
Daejeon KR |
