发明名称 |
Method for the production of metal oxide-containing layers |
摘要 |
The invention relates to a liquid-phase method for producing metal oxide-containing layers from nonaqueous solution. In said method, an anhydrous composition containing i) at least one metal oxo-alkoxide of generic formula MxOy(OR)z[O(R′O)cH]aXb[R″OH]d, where M=In, Ga, Sn, and/or Zn, x=3-25, y=1-10, z=3-50, a=0-25, b=0-20, c=0-1, d=0-25, R, R′, R″=organic group, X═F, Cl, Br, I, and ii) at least one solvent is applied to a substrate, is optionally dried, and is converted into a metal oxide-containing layer. The invention also relates to the layers that can be produced using the method of the invention and to the use thereof. |
申请公布号 |
US9309595(B2) |
申请公布日期 |
2016.04.12 |
申请号 |
US201013390840 |
申请日期 |
2010.08.13 |
申请人 |
Evonik Degussa GmbH |
发明人 |
Steiger Juergen;Pham Duy Vu;Thiem Heiko;Merkulov Alexey;Hoppe Arne |
分类号 |
C23C18/12 |
主分类号 |
C23C18/12 |
代理机构 |
Oblon, McClelland, Maier & Neustadt, L.L.P. |
代理人 |
Oblon, McClelland, Maier & Neustadt, L.L.P. |
主权项 |
1. A process for producing a metal oxide-containing layer, the process comprising applying an anhydrous solution to a substrate, optionally drying a resulting coated substrate and converting a coating formed from said anhydrous solution to form a metal oxide-containing layer, wherein the anhydrous solution comprises:
i) a metal oxo alkoxide of formula (I):
MxOy(OR)z[O(R′O)cH]aXb[R″OH]d (I),wherein
x=3-25,y=1-10,z=3-50,a=0-25,b=0-20,c=0-1,d=0-25,M=In, Ga, Sn, Zn, or a mixture thereof,R, R′, R″ individually represent an organic radical,X=F, Cl, Br, or I; and ii) a solvent. |
地址 |
Essen DE |