| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing device which enables a backing material and a template to be easily replaced.SOLUTION: A polishing device includes: a polishing head 20 which holds a workpiece 11; a surface plate in which a polishing pad is applied to a surface; and a rotary mechanism which rotates the polishing head 20 and the surface plate relative to each other. The polishing head 20 includes: a holding plate 26; and a template assembly 32 held by the holding plate 26. The template assembly 32 includes: a backing material 34 which contacts with the workpiece 11 and presses the workpiece 11 to a polishing surface of the polishing pad; and an annular template 36 fixed to the backing material 34 at the side of a surface of the backing material 34 which contacts with the workpiece 11, the annular template 36 holding the workpiece 11 while enclosing a periphery of the workpiece 11. The template assembly 32 is detachably fixed to the holding plate 26 through an adhesive film 30.SELECTED DRAWING: Figure 2 |
