发明名称 POLISHING COMPOSITION AND POLISHING METHOD USING SAME
摘要 The present invention provides a polishing composition capable of adequately limiting dishing phenomena in polishing steps and of more reliably eliminating level differences. The present invention is a polishing composition: which contains silica on the surface of which an organic acid has been fixed and a polyoxyalkylene group-containing compound; for which the molecular weight distribution of the weight average molecular weight (calculated as polyethylene glycol) of the polyoxyalkylene group-containing compound by gel permeation chromatography (GPC) has at least two peaks; and for which the pH is not more than 7.
申请公布号 WO2016052281(A1) 申请公布日期 2016.04.07
申请号 WO2015JP76810 申请日期 2015.09.18
申请人 FUJIMI INCORPORATED 发明人 YOSHIZAKI YUKINOBU
分类号 C09K3/14;B24B37/00;C09G1/02;H01L21/304 主分类号 C09K3/14
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