MULTIPLE BEAM PATH LASER OPTICAL SYSTEM BY MULTIPLE-BEAM REFLECTOR

摘要

Disclosed is a multiple optical path laser optical system using a multiple beam reflector. The optical path laser optical system using the multiple beam reflector is able to perform a nondestructive inspection by radiating a laser beam to multiple specimens through multiple optical paths at the same time. The multiple optical path laser optical system comprises: a light source unit generating the laser beam to be radiated to the specimen; the multiple beam reflector dividing the laser beam radiated from the light source unit, and providing the laser beam to the optical paths; a main beam splitter radiating the laser beam divided by the multiple beam reflector to the specimen; a transducer exciting the specimen to detect a signal of the laser beam radiated to the specimen; and a control unit analyzing a laser beam interference pattern generated as the laser beam interference pattern are recombined in the beam splitter after reflected from the specimen.