| 摘要 |
PROBLEM TO BE SOLVED: To highly efficiently replace gas at the inside of a substrate housing container which is mounted on a load port and in which a cover is opened.SOLUTION: A load port provided in a mini-environment device includes a high-speed shutter closing an opening opened by a port door. After the port door removes a cover of a substrate housing container, the high-speed shutter is closed to separate the substrate housing container from the mini-environment device. Accordingly, the atmosphere of the substrate housing container can be managed independently from the mini-environment device. In addition, inert gas can be circulated in the substrate housing container even when the cover is removed.SELECTED DRAWING: Figure 3 |
