| 摘要 |
PROBLEM TO BE SOLVED: To measure the positions of two conductive materials with high precision in real time.SOLUTION: The conductive material sensor includes: a magnetic field radiator 1 radiating a magnetic field to a conductive film 20 and a conductive material 21; an impedance measurement part 2 measuring the real part and the imaginary part of impedance of a coil 12 of the magnetic field radiator 1; a storage part 3 storing a first relation between the real part of the impedance and the positions of the conductive film and the conductive material and a second relation between the imaginary part of the impedance and the positions of the conductive film and the conductive material; a relation derivation part 4 deriving a third relation between the positions of the conductive film and the conductive material from the measurement result of the real part and the first relation and deriving a fourth relation between the positions of the conductive film and the conductive material from the measurement result of the imaginary part and the second relation; and a specifying part 5 determining the positions of the conductive film 20 and the conductive material 21 based on the third and fourth relations.SELECTED DRAWING: Figure 1 |
