| 摘要 |
PROBLEM TO BE SOLVED: To prevent joining quality degradation due to castellations 51a, 51b of a piezoelectric vibrator 20 for joining a piezoelectric chip 30, a base 50 and a lid 70 with glass 80.SOLUTION: On the surface of a piezoelectric chip 30 side of a base 50, a piezoelectric vibrator 20 includes protrusions 53 for thickness correction in regions, which are in the vicinities of the castellations 51a, 51b and where thickness of glass 80 is reduced due to these castellations and applied pressure is lowered during joining.SELECTED DRAWING: Figure 1 |
