发明名称 POLISHING COMPOSITION
摘要 [Problem] The purpose of this invention is to provide a polishing composition that can sufficiently control the polishing rate of a material containing Si. [Solution] Provided is a polishing composition that contains a pH adjusting agent and an organic compound, the organic compound being represented by formula (1), provided that A is an electron-withdrawing group. The pH of the polishing composition is over 7.5.
申请公布号 WO2016047714(A1) 申请公布日期 2016.03.31
申请号 WO2015JP76987 申请日期 2015.09.24
申请人 FUJIMI INCORPORATED 发明人 SUZUKI, SHOTA
分类号 C09K3/14;B24B37/00;C01G1/02;H01L21/304 主分类号 C09K3/14
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