| 摘要 |
PROBLEM TO BE SOLVED: To provide an imprint device that is advantageous for reducing the possibility of damage to a mold.SOLUTION: The imprint device is configured to perform imprint processing for forming a pattern on a substrate by hardening an imprint material on the substrate while bringing the mold into contact with the imprint material on the substrate. The imprint device includes: a regulation part for regulating a pressure on a surface of the mold confronting the substrate in such a manner that a pattern surface of the mold is deformed to protrude closer to the substrate; and a control part for controlling the imprint processing. The control part sets the pressure on the surface to a first pressure value via the regulation part in such a manner that the pattern surface is shaped to protrude before bringing the mold into contact with the imprint material on the substrate, and sets the pressure on the surface to a second pressure value smaller than the first pressure value via the regulation part in such a manner that a deformation amount of the pattern surface is reduced while the mold is pressed in contact with the imprint material on the substrate.SELECTED DRAWING: Figure 3 |
