| 摘要 |
PROBLEM TO BE SOLVED: To provide a base board sucking-fixing base and a base board sucking-fixing device capable of easily and surely fixing a shield plate even in a state where suction of a base board is stopped.SOLUTION: Disclosed is a base board sucking-fixing base 10 which sucks a base board 30 and fixes it onto the surface via a shield plate 20. This base 10 includes: a plurality of first suction holes 11 for sucking and fixing the shield plate 20, which are annually arranged on the surface; and a plurality of second suction holes 12 for sucking and fixing a base board 30, which are arranged in a region surrounded by the plurality of first suction holes 11 on the surface.SELECTED DRAWING: Figure 1 |
