| 发明名称 |
EUV IMAGING APPARATUS |
| 摘要 |
An EUV imaging apparatus is provided, which includes a reference structure and a first optical element, which is actuatable relative to the reference structure with the aid of a first actuator. The first actuator is a self-holding actuator. The apparatus includes a second optical element, which is actuatable relative to the reference structure a second actuator. The second actuator is a non-self-holding actuator. |
| 申请公布号 |
US2016077441(A1) |
申请公布日期 |
2016.03.17 |
| 申请号 |
US201514937340 |
申请日期 |
2015.11.10 |
| 申请人 |
Carl Zeiss SMT GmbH |
发明人 |
Kugler Jens;Hembacher Stefan;Schmid Michaela |
| 分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An imaging apparatus, comprising:
a reference structure; a first actuator; a second actuator; a first optical element actuatable relative to the reference structure via the first actuator; and a second optical element actuatable relative to the reference structure via the second actuator, wherein:
the first actuator is a self-holding actuator;the second actuator is a non-self holding actuator; andthe imaging apparatus is an EUV imaging apparatus. |
| 地址 |
Oberkochen DE |
