IMPROVED FLOATING-TYPE COATING APPARATUS, SYSTEM, AND METHOD OF SUBSTRATE

摘要

The present invention relates to an improved floating type substrate coating device, a coating system thereof, and a coating method thereof. According to an embodiment of the present invention, the floating type substrate coating device comprises: a stage which supports a substrate by a floating type; a substrate transfer device which transfers the substrate on the stage by the floating type; a nozzle device provided onto the stage and configured to spray a coating solution on the substrate; and an air supply device provided to a leading end of the nozzle device to supply an air curtain to an upper portion of the substrate. Therefore, the device prevents a front end and a rear end of the substrate from being lifted by an air levitation force.