| 摘要 |
An appearance inspection apparatus and an appearance inspection method capable of detecting a shape, minute unevenness on the surface, shine or changes in color tone on the surface of a sample under inspection. The method includes the steps of acquiring reflected luminance data on the sample surface by casting a slit light having an intermediate wavelength of three types of lights having different wavelengths from each other and receiving reflected light of the slit light, acquiring surface data on the sample surface by casting two lights of different wavelengths other than the intermediate wavelength at a position other than the position illuminated by the slit light on the sample surface from two different directions so as to overlap the two lights with each other and receiving the reflected light, and detecting surface unevenness from a ratio between the intensities of the two lights, changes in color tone by combining the reflected luminance data and the surface data, and gloss on the sample surface based on the presence or absence of surface unevenness and the changes in color tone. |
