| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a reproduction mold with high durability and being inexpensive. <P>SOLUTION: The reproduction mold 1 is a reproduction mold 1 for nano imprint and includes: a base body 10; and a reproduction mold structural body 20 which is formed on the base body 10, in which the main components comprise inorganic nano particles and a resin, and on the surface of which unevenness is formed. The reproduction mold structural body 20 has an indentation elasticity of ≥4,000 N/mm<SP POS="POST">2</SP>and ≤74,000 N/mm<SP POS="POST">2</SP>, a linear thermal expansion coefficient of less than 10×10<SP POS="POST">-5</SP>K<SP POS="POST">-1</SP>, and a transmittance of ≥70% at 365 nm. <P>COPYRIGHT: (C)2013,JPO&INPIT |
