| 摘要 |
PROBLEM TO BE SOLVED: To obtain a laminate device capable of suppressing the generation of the failures in the body to be laminated caused by the ununiformity of heating upon laminate working.SOLUTION: The inside of a vacuum chamber composing a treatment space for subjecting the body to be laminated to laminate treatment is provided with: a heating means of heating the body to be laminated; and a pressurization means provided at the upper part of the heating means and pressurizing the body to be laminated heated by the heating means under a vacuum. The heating means has: a planar heating heater board; and a holding part provided directly above the heating heater board and holding the body to be laminated, whose inside can be filled and exhausted with a fluid, further, the upper face of holding the body to be laminated in a state where the fluid is filled at the inside can be deformed along the surface shape of the body to be laminated.SELECTED DRAWING: Figure 1 |
