| 发明名称 |
Charged particle beam apparatus with shielding member having a charge control electrode |
| 摘要 |
A shielding member for a charged particle beam apparatus includes a conductive substrate (131); and a through hole (132) extending through the conductive substrate (131). The conductive substrate (131) is comprised of a material having a specific electrical resistivity in a range from about 10 6 ©cm to about 10 12 ©cm. |
| 申请公布号 |
EP2551889(B1) |
申请公布日期 |
2016.03.02 |
| 申请号 |
EP20110175427 |
申请日期 |
2011.07.26 |
| 申请人 |
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FÜR HALBLEITERPRÜFTECHNIK MBH |
发明人 |
WINKLER, DIETER;LANIO, STEFAN |
| 分类号 |
H01J37/09 |
主分类号 |
H01J37/09 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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