发明名称 HANDLE SUBSTRATE FOR COMPOSITE SUBSTRATE FOR SEMICONDUCTOR
摘要 A handle substrate is composed of a translucent alumina sintered body containing a sintering aid including at least magnesium. A concentration of magnesium at a bonding face of the handle substrate to a donor substrate is half or less of an average concentration of magnesium of the handle substrate.
申请公布号 EP2991099(A1) 申请公布日期 2016.03.02
申请号 EP20140787593 申请日期 2014.03.13
申请人 NGK INSULATORS, LTD. 发明人 MIYAZAWA, SUGIO
分类号 H01L21/02;C04B35/115;H01L21/762 主分类号 H01L21/02
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