| 发明名称 |
CARRIER FOR A SUBSTRATE AND METHOD FOR CARRYING A SUBSTRATE |
| 摘要 |
A carrier for carrying a substrate in a deposition chamber is described. The carrier includes a frame for vertically holding the substrate, wherein the frame has a substantially rectangular shape with a bottom frame part; a fixing means for firmly fixing the substrate to the carrier, wherein the fixing means is located in a center region of the bottom frame part; and one or more support members for supporting but not firmly fixing the substrate. Further, a method for carrying a substrate during deposition is described. |
| 申请公布号 |
US2016053361(A1) |
申请公布日期 |
2016.02.25 |
| 申请号 |
US201314770781 |
申请日期 |
2013.03.15 |
| 申请人 |
Applied Materials, Inc. |
发明人 |
HINTERSCHUSTER Reiner;BRÜNING Andre |
| 分类号 |
C23C14/04;C23C16/04;C23C14/50;C23C16/458 |
主分类号 |
C23C14/04 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A carrier for carrying a substrate in a deposition chamber, comprising:
a frame for vertically holding the substrate, wherein the frame has a substantially rectangular shape with a bottom frame part; a fixing means for firmly fixing the substrate to the carrier, wherein the fixing means is located in a center region of the bottom frame part; and one or more support members for supporting but not firmly fixing the substrate. |
| 地址 |
Santa Clara CA US |
