NANOPARTICLE DIFFERENTIATION DEVICE

摘要

A nanoparticle differentiation device 1 includes: a plurality of chambers 9 that are linearly arranged, and divided from each other by partitions 5; a generation chamber 2 that is provided with a material 4 to be vaporized; a plurality of film forming chambers 3a to 3c that are provided with respective substrates 7 on which nanoparticles 8a to 8c generated from the material 4 are film-formed; a plurality of communication tubes 6 that are provided to penetrate the respective partitions 5 in order to cause the adjoining chambers 9 to communicate with each other; a gas introducing tube 10 that communicates with the generation chamber 2 in order to introduce cooling gas; and a vacuum tube 14 that communicates with a high vacuum chamber 13 that is a chamber 9 arranged at a position farthest from the generation chamber 2, i.e., the film forming chamber 3c, among the chambers 9 in order to perform evacuation.

主权项

1. A nanoparticle differentiation device, comprising:
a plurality of chambers that are linearly arranged, and divided from each other by partitions, the plurality of chambers including a generation chamber arranged at one end that is provided with a material to be vaporized, and a plurality of film forming chambers that are provided with respective substrates on which nanoparticles generated from the material are film-formed; a plurality of communication tubes that are provided to penetrate the respective partitions in order to cause adjoining chambers to communicate with each other; a gas introducing tube that communicates with the generation chamber in order to introduce cooling gas; and a vacuum tube that communicates with a high vacuum film forming chamber that is a arranged at a position farthest from the generation chamber among the film forming chambers in order to perform evacuation.