发明名称 Method and apparatus for power device with depletion structure
摘要 A semiconductor device is provided. The semiconductor device includes a substrate of a first conductivity type and an epitaxial structure of the first conductivity type disposed on the substrate. The semiconductor device further includes a well region having a first doping concentration of a second conductivity type disposed in the epitaxial structure and the substrate. The semiconductor device further includes a drain region and a source region respectively formed in the epitaxial structure inside and outside of the well region. The semiconductor device further includes a body region of the first conductivity type disposed under the source region, and a pair of first and second doped regions disposed in the well region between the drain region and the source region. The first and second doped regions extend outside of the well region and toward the body region.
申请公布号 US9269808(B2) 申请公布日期 2016.02.23
申请号 US201414186530 申请日期 2014.02.21
申请人 Vanguard International Semiconductor Corporation 发明人 Lin Shin-Cheng;Tu Shang-Hui;Ho Yu-Hao;Lin Wen-Hsin
分类号 H01L29/78;H01L29/66;H01L29/10;H01L29/06;H01L29/08;H01L21/265 主分类号 H01L29/78
代理机构 Finnegan, Henderson, Farabow, Garrett & Dunner, LLP 代理人 Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
主权项 1. A semiconductor device comprising: a substrate having a first conductivity type; a drain region, a source region, and a well region disposed in the substrate, the well region being disposed between the drain region and the source region and having a second conductivity type opposite to the first conductivity type; a body region having the first conductivity type and disposed under the source region; and first and second doped regions disposed in the well region, the first doped region having the first conductivity type, and the second doped region being stacked on the first doped region and having the second conductivity type, the first and second doped regions extending outside of the well region and toward the body region.
地址 Hsinchu TW