MICROELECTROMECHANICAL SYSTEMS DEVICE OPTIMIZED FOR FLIP-CHIP ASSEMBLY AND METHOD OF ATTACHING THE SAME

摘要

A microelectromechanical systems (MEMS) device optimized for flip-chip assembly and method of attaching the same are presented herein. A device can include a substrate, an acoustic seal, and a MEMS device mechanically attached to the substrate utilizing bond pad(s) that electrically couple the MEMS device to the substrate and/or an application-specific integrated circuit (ASIC). A portion of the MEMS device includes an acoustic area, an acoustic seal area that surrounds the acoustic area and includes the acoustic seal, and electrical interconnect area(s) that are located outside of the acoustic seal area and include the bond pad(s). The acoustic seal can be compressed between the acoustic seal area and the substrate and/or the ASIC, and include a thixotropic adhesive material. Mechanical support(s) that define a gap between the MEMS device and the substrate and/or the ASIC can be attached to the acoustic seal area and/or the substrate.

主权项

1. A device comprising:
a substrate; an acoustic seal; and micro-electro-mechanical system (MEMS) device mechanically attached to the substrate utilizing at least one bond pad that electrically couples the MEMS device to at least one of the substrate or an application-specific integrated circuit (ASIC), wherein a portion of the MEMS device comprises an acoustic area, an acoustic seal area that surrounds the acoustic area and includes the acoustic seal, and at least one electrical interconnect area that is located outside of the acoustic seal area and comprises the at least one bond pad.