发明名称 |
SEMICONDUCTOR DEVICE AND DISPLAY DEVICE HAVING SEMICONDUCTOR DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To inhibit fluctuation in electric characteristics and improve reliability in a semiconductor device having a transistor having an oxide semiconductor.SOLUTION: A semiconductor device comprises a transistor including: an oxide semiconductor film on a first insulation film; a gate insulation film on the oxide semiconductor film; a gate electrode on the gate insulation film; a conductive film which contacts a lateral face in a channel length direction of the gate electrode; and a second insulation film on the oxide semiconductor film. The oxide semiconductor film has a first region which overlaps the gate electrode, a second region which overlaps the conductive film and a third region which contacts the second insulation film. The third region has a region where a concentration of an impurity element is higher than that of the second region.SELECTED DRAWING: Figure 1 |
申请公布号 |
JP2016027649(A) |
申请公布日期 |
2016.02.18 |
申请号 |
JP20150132287 |
申请日期 |
2015.07.01 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
KAMINAGA MASAMI;IGUCHI TAKAHIRO |
分类号 |
H01L29/786;G02F1/1368;H01L21/336;H01L51/50;H05B33/14 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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