| 摘要 |
The present invention refers to a process for joining surfaces of materials of PDMS used in the manufacture of microfluid devices and in pressure sensors applications. This process consists in joining two PSMS layers of different thicknesses, the first having a thickness of 50 to 500 um and the second, before being cured, having a thickness of 3 to 10 mm. The first layer is obtained from the synthesis of the PDMS deposited by the layer coating system by centrifugation, this layer being previously cured in a furnace at 70°C for 2 hours over a layer of photosensitive resin previously deposited over a silicon substrate. After being cured, a plasma treatment is performed in an oxygen environment by means of reactive ion etching (RIE) at 20W for 10 minutes. After the plasma treatment is performed, a second layer of PDMS being deposited in a liquid manner over the first layer that corresponds to the substrate that supports the membrane; after performing the curing process of the second laye r, the structure being submerged in acetone for being separated from the rigid substrate, obtaining in this manner the structure for joining the two surfaces of PDMS. |
