金属多層膜の成膜方法および金属多層膜の成膜装置,申请号JP20120059245-传众专利搜索

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发明名称	金属多層膜の成膜方法および金属多層膜の成膜装置
摘要
申请公布号	JP5859885(B2)	申请公布日期	2016.02.16
申请号	JP20120059245	申请日期	2012.03.15
申请人	大陽日酸株式会社	发明人	清水秀治
分类号	C23C16/02;C23C16/18;H01L21/28;H01L21/285	主分类号	C23C16/02
代理机构		代理人
主权项
地址

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