| 摘要 |
A charged-particle-beam device, provided with: a field emission electron source; an extraction electrode for extracting electrons from the field emission electron source; an acceleration electrode for accelerating the electrons radiated from the field emission electron source; and a power supply unit (39) capable of supplying an extraction voltage applied between the field emission electron source and the extraction electrode, an acceleration voltage applied between the field emission electron source and the acceleration electrode, and a heating voltage for heating the field emission electron source. The power supply unit (39) is provided with a switching unit (36) for switching the upper limit value of the power supply unit (39). The power supply unit (39) controls the switching unit (36) while applying the extraction voltage and the acceleration voltage, and thereby simultaneously supplies the extraction voltage, the acceleration voltage, and the heating voltage. |
