IMPRINT DEVICE AND METHOD, MANUFACTURING METHOD OF ARTICLE, AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide an imprint technology that is advantageous for making throughput and yield compatible.SOLUTION: An imprint device performs pattern formation with a product pattern collectively on a plurality of areas. Each of the plurality of areas corresponds to at least one product. In the case where a foreign substance or missing is present in partial areas among the plurality of areas, a control section for controlling operation of an imprint section controls the operation of the imprint section so as to perform the pattern formation while having another pattern different from the product pattern in areas corresponding to the partial areas and having the product pattern in areas corresponding to different areas from the partial areas.SELECTED DRAWING: Figure 1