| 摘要 |
PROBLEM TO BE SOLVED: To provide a hard film which is formed on a base material surface of a jig, a tool, etc., and has high hardness and superior adhesion and wear resistance.SOLUTION: A hard film 1 is formed on a base material 10, and comprises an A layer 4 having a composition of [Si(CN)] and a B layer 5 having a composition of one of [TiAl(CN)], [AlCr(CN)], [TiCrAlSi(CN)], and [TiSi(CN)]. A ground layer 2 comprising a B layer is formed on the base material, and an adhesion enhancing layer 3 having an A layer 4 and a B layer 5 laminated alternately and repeatedly is formed on the ground layer 2. A pair of layers 4, 4 adjoining each other across a B layer 5 in the adhesion enhancing layer 3 are formed in such a manner that the thickness of the A layer 4 formed on a side close to the ground layer 2 is larger than that of the A layer 4 formed on a side distant from the ground layer 2, and the A layer 4 in the adhesion enhancing layer 3 has a maximum thickness of 15 nm or larger. |
