SCANNING PROBE MICROSCOPE AND SCANNING PROBE MICROSCOPY

摘要

A scanning probe microscope includes a vibration unit to vibrate the cantilever on the basis of a vibration signal, a displacement detection unit to output a displacement signal indicating the displacement of the cantilever, a phase adjustment unit to provide a phase offset to a phase difference between the vibration signal and displacement signal, a phase signal generating unit to generate a phase signal including information regarding the phase difference and phase offset, and a control unit to control the distance between the probe and sample on the basis of the phase signal. The phase adjustment unit combines a first phase amount that cancels an initial phase difference exiting in a condition where the probe and sample are out of contact, with a second phase amount equal to or more than (0 [rad]) and less than or equal to (π/2 [rad]) and provides a combined amount to the phase difference.

主权项

1. A scanning probe microscopy to acquire information regarding the surface of a sample by use of a cantilever having a probe at a free end thereof, the scanning probe microscopy comprising:
vibrating the cantilever on the basis of a vibration signal; obtaining a displacement signal indicating the displacement of the cantilever; providing a phase offset to a phase difference between the vibration signal and the displacement signal; obtaining a first phase signal including information regarding the phase difference between the vibration signal and the displacement signal and the phase offset; and controlling the distance between the probe and the sample on the basis of the first phase signal, the providing the phase offset being providing a combined amount of a first phase amount that cancels an initial phase difference between the vibration signal and the displacement signal exiting in a condition where the probe and the sample are out of contact, and a second phase amount equal to or more than (0 [rad]) and less than or equal to (π/2 [rad]).